年度 2009
全部作者 汪上曉 David Shan-Hill Wong
論文名稱 Performance assessment of run-to-run control in semiconductor manufacturing based on IMC framework. Author(s) : Chen L, Ma MD, Jang SS, Wang DSH, Wang SQ Source: International Journal of Production Research Volume: 47 Issue: 15 Page: 4173-4199 Published: 2009
語言 中文
參考連結 https://www.tandfonline.com/doi/abs/10.1080/00207540802029633#.UzJmwvmSzRI