Year	2018
Authors	Hsin-Lung Chen ,Chen, M.-H.; Lai, C.-C.; Chen, H.-L*.; Lin, Y.-H.; Huang, K.-Y.; Lin, C.-H.; Hsiao, H.-T.; Liu, L.-C.; Chen, C.-M.
Paper Title	Preparation of photosensitive polyimides (PSPIs) and their feasible evaluation for lithographic insulation patterns (LIPs) of integrated circuits (ICs) without negative photoresists.
Journal Title	Materials Science in Semiconductor Processing
Vol.No	88
Page(s)	132-
Language	English