Year | 2018 |
---|---|
Authors | Rong-Ming Ho |
Paper Title | “Silicon-Containing Block Copolymers for Lithographic Applications”, |
Journal Title | Prog. Polym. Sci. |
Vol.No | 77 |
Page(s) | 19-68 |
Language | English |
Login NTHU-CHE
Year | 2018 |
---|---|
Authors | Rong-Ming Ho |
Paper Title | “Silicon-Containing Block Copolymers for Lithographic Applications”, |
Journal Title | Prog. Polym. Sci. |
Vol.No | 77 |
Page(s) | 19-68 |
Language | English |