Year	2011
Authors	David Shan-Hill Wong
Paper Title	A virtual metrology model based on recursive canonical variate analysis with applications to sputtering process. Author(s) : Pan TH, Sheng BQ, Wong DSH, Jang SS Source: Journal of Process Control Volume: 21 Issue: 6 Page: 830-839 Published: 2011
Language	Chinese
Reference URL	https://www.sciencedirect.com/science/article/pii/S0959152411000801