Year | 2011 |
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Authors | David Shan-Hill Wong |
Paper Title | A virtual metrology model based on recursive canonical variate analysis with applications to sputtering process. Author(s) : Pan TH, Sheng BQ, Wong DSH, Jang SS Source: Journal of Process Control Volume: 21 Issue: 6 Page: 830-839 Published: 2011 |
Language | Chinese |
Reference URL | https://www.sciencedirect.com/science/article/pii/S0959152411000801 |