Year | 2009 |
---|---|
Authors | David Shan-Hill Wong |
Paper Title | Identification of tool and product effects in a mixed product and parallel tool environment. Author(s) : Ma MD, Chang CC, Wong DSH, Jang SS Source: Journal of Process Control Volume: 19 Issue: 4 Page: 591-603 Published: 2009 |
Language | Chinese |
Reference URL | https://www.sciencedirect.com/science/article/pii/S0959152408001297 |