Year 2011
Authors David Shan-Hill Wong
Paper Title Monitoring Batch Processes with Multiple On-Off Steps in Semiconductor Manufacturing. Author(s) : Lee SP, Chao AK, Tsung F, Wong DSH, Tseng ST, Jang SS Source: Journal of Quality Technology Volume: 43 Issue: 2 Page: 142-157 Published: 2011
Language Chinese
Reference URL http://asq.org/quality-technology/2011/03/statistics/monitoring-batch-processes-with-multiple-onoff-steps-in-semiconductor-manufacturing.html