Year	2009
Authors	David Shan-Hill Wong
Paper Title	Threaded EWMA Controller Tuning and Performance Evaluation in a High-Mixed System. Author(s) : Ma MD, Chang CC, Wong DSH, Jang SS Source: IEEE Transactions on Semiconductor Manufacturing Volume: 22 Issue: 4 Page: 507-511 Published: 2009
Language	Chinese
Reference URL	https://ieeexplore.ieee.org/document/5170101