Year | 2011 |
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Authors | David Shan-Hill Wong |
Paper Title | A G&P EWMA algorithm for high-mix semiconductor manufacturing processes. Author(s) : Chang CC, Pan TH, Wong DSH, Jang SS Source: Journal of Process Control Volume:21 Issue: 1 Page: 28-35 Published: 2011 |
Language | Chinese |
Reference URL | https://www.sciencedirect.com/science/article/pii/S095915241000185X |