Year | 2012 |
---|---|
Authors | David Shan-Hill Wong |
Paper Title | An Adaptive-Tuning Scheme for G&P EWMA Run-to-Run Control. Author(s) : Chang CC, Pan TH, Wong DSH, Jang SS Source: IEEE Transactions on Semiconductor Manufacturing Volume: 25 Issue: 2 Page: 230 - 237 Published: 2012 |
Language | Chinese |
Reference URL | https://ieeexplore.ieee.org/document/6156463?arnumber=6156463 |