Year 2012
Authors David Shan-Hill Wong
Paper Title An Adaptive-Tuning Scheme for G&P EWMA Run-to-Run Control. Author(s) : Chang CC, Pan TH, Wong DSH, Jang SS Source: IEEE Transactions on Semiconductor Manufacturing Volume: 25 Issue: 2 Page: 230 - 237 Published: 2012
Language Chinese
Reference URL https://ieeexplore.ieee.org/document/6156463?arnumber=6156463