年度 2012
全部作者 汪上曉 David Shan-Hill Wong
論文名稱 An Adaptive-Tuning Scheme for G&P EWMA Run-to-Run Control. Author(s) : Chang CC, Pan TH, Wong DSH, Jang SS Source: IEEE Transactions on Semiconductor Manufacturing Volume: 25 Issue: 2 Page: 230 - 237 Published: 2012
語言 中文
參考連結 https://ieeexplore.ieee.org/document/6156463?arnumber=6156463