年度 | 2012 |
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全部作者 | 汪上曉 David Shan-Hill Wong |
論文名稱 | An Adaptive-Tuning Scheme for G&P EWMA Run-to-Run Control. Author(s) : Chang CC, Pan TH, Wong DSH, Jang SS Source: IEEE Transactions on Semiconductor Manufacturing Volume: 25 Issue: 2 Page: 230 - 237 Published: 2012 |
語言 | 中文 |
參考連結 | https://ieeexplore.ieee.org/document/6156463?arnumber=6156463 |