Year | 2012 |
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Authors | David Shan-Hill Wong |
Paper Title | Chamber Matching of Semiconductor Manufacturing Process Using Statistical Analysis. Author(s) : Pan TH, Wong DSH, Jang SS Source: IEEE Transactions on Systems, Man, and Cybernetics - Part C: application and Reviews Volume: 42 Issue: 4 Page: 571 - 576 Published: 2012 |
Language | Chinese |
Reference URL | https://ieeexplore.ieee.org/document/06012555 |