年度	2012
全部作者	汪上曉 David Shan-Hill Wong
論文名稱	Chamber Matching of Semiconductor Manufacturing Process Using Statistical Analysis. Author(s) : Pan TH, Wong DSH, Jang SS Source: IEEE Transactions on Systems, Man, and Cybernetics - Part C: application and Reviews Volume: 42 Issue: 4 Page: 571 - 576 Published: 2012
語言	中文
參考連結	https://ieeexplore.ieee.org/document/06012555