Year	2009
Authors	David Shan-Hill Wong
Paper Title	Performance assessment of run-to-run control in semiconductor manufacturing based on IMC framework. Author(s) : Chen L, Ma MD, Jang SS, Wang DSH, Wang SQ Source: International Journal of Production Research Volume: 47 Issue: 15 Page: 4173-4199 Published: 2009
Language	Chinese
Reference URL	https://www.tandfonline.com/doi/abs/10.1080/00207540802029633#.UzJmwvmSzRI