年度 | 2009 |
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全部作者 | 汪上曉 David Shan-Hill Wong |
論文名稱 | Performance assessment of run-to-run control in semiconductor manufacturing based on IMC framework. Author(s) : Chen L, Ma MD, Jang SS, Wang DSH, Wang SQ Source: International Journal of Production Research Volume: 47 Issue: 15 Page: 4173-4199 Published: 2009 |
語言 | 中文 |
參考連結 | https://www.tandfonline.com/doi/abs/10.1080/00207540802029633#.UzJmwvmSzRI |