| 年度 | 2018 |
|---|---|
| 全部作者 | 陳信龍 Hsin-Lung Chen,Chen, M.-H.; Lai, C.-C.; Chen, H.-L*.; Lin, Y.-H.; Huang, K.-Y.; Lin, C.-H.; Hsiao, H.-T.; Liu, L.-C.; Chen, C.-M. |
| 論文名稱 | Preparation of photosensitive polyimides (PSPIs) and their feasible evaluation for lithographic insulation patterns (LIPs) of integrated circuits (ICs) without negative photoresists. |
| 期刊名稱 | Materials Science in Semiconductor Processing |
| 卷數 | 88 |
| 頁碼 | 132- |
| 語言 | 英文 |